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1

Growth and characterization of heavily doped silicon crystals

R. Scala, M. Porrini, G. Borionetti

Journal:

Crystal Research and Technology

Year:

2011

Language:

english

File:

PDF, 298 KB

english, 2011

2

Gate oxide integrity dependence on substrate characteristics and SiO2 thickness

F. Bonoli, P. Godio, G. Borionetti, R. Falster

Journal:

Materials Science in Semiconductor Processing

Year:

2001

Language:

english

File:

PDF, 101 KB

english, 2001

3

Study on the effect of Silicon surface cleaning processes on Gate Oxide Integrity

Corradi, A., Borzoni, E., Godio, P., Borionetti, G.

Journal:

MRS Proceedings

Year:

1997

Language:

english

File:

PDF, 311 KB

english, 1997

4

ChemInform Abstract: Growth and Characterization of Heavily Doped Silicon Crystals

R. Scala, M. Porrini, G. Borionetti

Journal:

Year:

2011

File:

PDF, 18 KB

2011

5

Metal and organic contamination effects on the characteristics of thin oxides thermally grown on silicon based wafers

G. Borionetti, P. Geranzani, R. Orizio, P. Godio, F. Bonoli, F. Pagani, C. Pello’

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2006

Language:

english

File:

PDF, 237 KB

english, 2006

6

Oxygen precipitate precursors and size thresholds for the preferential nucleation for copper and nickel precipitation in silicon: the detection of copper and nickel contamination by minority carrier lifetime methods

A. Bazzali, G. Borionetti, R. Orizio, D. Gambaro, R. Falster

Journal:

Materials Science and Engineering: B

Year:

1996

Language:

english

File:

PDF, 529 KB

english, 1996

7

A review of in-line/off-line defect characterization techniques applied to control and improve electronic grade silicon wafer manufacturing processes

Journal:

Materials Science and Engineering: B

Year:

2002

Language:

english

File:

PDF, 461 KB

english, 2002

8

Optical absorption of precipitated oxygen in silicon at liquid helium temperature

A Sassella, A Borghesi, G Borionetti, P Geranzani

Journal:

Materials Science and Engineering: B

Year:

2000

Language:

english

File:

PDF, 131 KB

english, 2000

9

Influence of Czochralski silicon crystal growth on wafer quality: an extensive investigation using traditional and new characterization techniques

M Porrini, P Collareta, G Borionetti, D Gambaro, I Fini

Journal:

Materials Science and Engineering: B

Year:

2000

Language:

english

File:

PDF, 400 KB

english, 2000

10

Crystal-related defects evolution during thin epitaxial layer growth on silicon wafers

G Borionetti, D Gambaro, S Santi, M Borgini, P Godio, S Pizzini

Journal:

Materials Science and Engineering: B

Year:

2000

Language:

english

File:

PDF, 248 KB

english, 2000

11

Non-destructive diagnostic techniques for oxygen precipitates in Czochralski silicon

A. Bazzali, G. Borionetti, R. Falster, D. Gambaro, L. Mule’Stagno, M. Olmo, R. Orizio, M. Porrini

Journal:

Materials Science in Semiconductor Processing

Year:

2001

Language:

english

File:

PDF, 187 KB

english, 2001

12

Lattice dynamics and vibrational spectra of conformationally disordered polymers: poly(vinylidene fluoride)

Gabriella Borionetti, Giuseppe Zannoni, Giuseppe Zerbi

Journal:

Journal of Molecular Structure

Year:

1990

Language:

english

File:

PDF, 1.32 MB

english, 1990

13

Infrared response of oxygen precipitates in silicon: Experimental and simulated spectra

Sassella, A., Borghesi, A., Geranzani, P., Borionetti, G.

Journal:

Applied Physics Letters

Year:

1999

Language:

english

File:

PDF, 344 KB

english, 1999

14

The photoluminescence emission in the 0.7-0.9 eV range from oxygen precipitates, thermal donors and dislocations in silicon

Pizzini, S, Guzzi, M, Grilli, E, Borionetti, G

Journal:

Journal of Physics Condensed Matter

Year:

2000

Language:

english

File:

PDF, 335 KB

english, 2000

15

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Comparability of TXRF Systems at Different Laboratories

Nutsch, Andreas, Beckhoff, Burkhard, Altmann, Roswitha, Polignano, Maria Luisa, Cazzini, Elena, Codegoni, Davide, Borionetti, Gabriella, Kolbe, Michael, Mueller, Matthias, Mantler, Claus, Streli, Chri

Year:

2009

Language:

english

File:

PDF, 222 KB

english, 2009

16

Silicon Epitaxial Layers for CCD and CMOS Imager Sensors : Limits and Challenges of the In-Line and Off-Line Metal Detection Techniques

Borionetti, G., Cox, S., Godio, P., Gohar, I., Pitney, J., Seacrist, M.

Journal:

Solid State Phenomena

Year:

2008

Language:

english

File:

PDF, 406 KB

english, 2008

17

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Assessing Various Analytical Techniques with Different Lateral Resolution by Investigating Spin-coated Inorganic Contamination on Si Wafer Surfaces

Beckhoff, Burkhard, Nutsch, Andreas, Altmann, Roswitha, Borionetti, Gabriella, Pello, C., Polignano, Maria Luisa, Codegoni, Davide, Grasso, Salvatore, Cazzini, Elena, Bersani, Massimo, Gennaro, Salvat

Year:

2009

Language:

english

File:

PDF, 998 KB

english, 2009

18

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Niobium Contamination in Silicon

Polignano, Maria Luisa, Codegoni, Davide, Borionetti, Gabriella, Bonoli, Francesco, Brivio, Jacopo, Greco, Stefano, Marino, Antonio, Monge, Paolo, Patoprsta, Ivana, Privitera, Vittorio, Riva, Caterina

Year:

2010

Language:

english

File:

PDF, 486 KB

english, 2010

19

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Improved TEM Sample Preparation by Low Energy FIB for Strain Analysis by Convergent Beam Electron Diffraction

Balboni, Roberto, Borionetti, Gabriella, Moiraghi, Luigi, Vaccari, Giuseppe, Polignano, Maria Luisa, Carnevale, Gian Pietro, Cazzaniga, Francesco, Mica, Isabella, Sammiceli, Francesca

Year:

2009

Language:

english

File:

PDF, 750 KB

english, 2009

20

Highly Sensitive Detection of Inorganic Contamination

Beckhoff, Burkhard, Nutsch, Andreas, Altmann, Roswitha, Borionetti, G., Pello, C., Polignano, Maria Luisa, Codegoni, Davide, Grasso, Salvo, Cazzini, Elena, Bersani, M., Lazzeri, P., Gennaro, S., Kolbe

Journal:

Solid State Phenomena

Year:

2009

Language:

english

File:

PDF, 344 KB

english, 2009

21

Internal Gettering in Silicon: Experimental and Theoretical Studies Based on Fast and Slow Diffusing Metals

Geranzani, P., Pagani, M., Pello, C., Borionetti, G.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 365 KB

2002

22

Internal Gettering Efficiency in p/p+ and p/p- Silicon Epistructures

Frigeri, C., Borionetti, G., Godio, P., Gombia, E.

Journal:

Solid State Phenomena

Year:

2004

File:

PDF, 732 KB

2004

23

Reliable Quantification of Inorganic Contamination by TXRF

Müller, Matthias, Nutsch, Andreas, Altmann, Roswitha, Borionetti, Gabriella, Holz, T., Mantler, C., Hönicke, Philipp, Kolbe, Michael, Beckhoff, Burkhard

Journal:

Solid State Phenomena

Year:

2012

Language:

english

File:

PDF, 1.23 MB

english, 2012

24

The Origin of Photoluminescence from Oxygen Precipitates Nucleated at Low Temperature in Semiconductor Silicon

Leoni, E., Martinelli, L., Binetti, S., Borionetti, G., Pizzini, S.

Journal:

Journal of The Electrochemical Society

Year:

2004

Language:

english

File:

PDF, 80 KB

english, 2004

25

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Comparison of Silicon Surface Preparation Methods for Measurement of Minority Carrier Lifetime using the Microwave Photo-conductive Decay (μ-PCD) coupled with Continuous Corona Charge (Charge-PCD)

Pavelka, Tibor, Pap, Aron, Kenesei, Peter, Varga, Mariann, Novinics, F., Tallian, Miklos, Borionetti, Gabriella, Guaglio, Gianluca, Pfeffer, Markus, Don, Eric R.

Year:

2009

Language:

english

File:

PDF, 263 KB

english, 2009

26

Reference Samples for Ultra Trace Analysis of Organic Compounds on Substrate Surfaces

Nutsch, Andreas, Beckhoff, Burkhard, Borionetti, G., Codegoni, Davide, Grasso, S., Hönicke, Philipp, Leibold, Andreas, Müller, Matthias, Otto, Michael, Pfitzner, Lothar, Polignano, Maria Luisa

Journal:

Solid State Phenomena

Year:

2012

Language:

english

File:

PDF, 519 KB

english, 2012

27

Passivation of Al/Si Interface by Chemical Treatment: Schottky Barrier Height and Plasma Etch Induced Defects

Horváth, Zsolt E., Ádám, M., Godio, P., Borionetti, G., Szabó, I.A., Gombia, E., Van Tuyen, Vo

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 314 KB

2002

28

[ECS Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) - Munich, Germany (September 13 - September 14, 2007)] ECS Transactions - Surface Microdefects Control during Chemical Mechanical Polishing of Silicon Wafers: an Example of in line Manufacturing Process Control

Borionetti, Gabriella, Corradi, Alessandro, Mainardi, Nicola, Rinaldi, Antonio M., Takami, Keiichi

Year:

2007

Language:

english

File:

PDF, 511 KB

english, 2007

29

Analysis of Contaminated Oxide-Silicon Interfaces

Polignano, Maria Luisa, Codegoni, Davide, Castellano, Luca, Greco, Stefano, Borionetti, Gabriella, Bonoli, Francesco, Nutsch, Andreas, Altmann, Roswitha, Liebold, Andreas, Otto, Michael, Monge, Paolo,

Journal:

Solid State Phenomena

Year:

2011

Language:

english

File:

PDF, 347 KB

english, 2011

30

AIP Conference Proceedings [AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 - Grenoble (France) (23–26 May 2011)] - The Impact Of Organic Contamination On The Oxide-Silicon Interface

Codegoni, D., Polignano, M. L., Castellano, L., Borionetti, G., Bonoli, F., Nutsch, A., Leibold, A., Otto, M., Seiler, David G., Diebold, Alain C., McDonald, Robert, Chabli, Amal, Secula, Erik M.

Year:

2011

Language:

english

File:

PDF, 197 KB

english, 2011

31

[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Characterization of Organic Contamination in Semiconductor Manufacturing Processes

Nutsch, A., Beckhoff, B., Bedana, G., Borionetti, G., Codegoni, D., Grasso, S., Guerinoni, G., Leibold, A., Müller, M., Otto, M., Pfitzner, L., Polignano, M.-L., De Simone, D., Frey, L., Secula, Erik

Year:

2009

Language:

english

File:

PDF, 1.22 MB

english, 2009

32

Internal gettering in epi-silicon prepared under different conditions

Frigeri, C, Borionetti, G, Godio, P

Journal:

Journal of Physics Condensed Matter

Year:

2002

Language:

english

File:

PDF, 271 KB

english, 2002

33

Defect structure and strain reduction of 3C-SiC/Si layers obtained with the use of buffer layer and methyltrichlorosilane addition

Bosi, Matteo, Attolini, Giovanni, Negri, Marco, Claudio, Ferrari, Buffagni, Elisa, Frigeri, Cesare, Calicchio, Marco, Pécz, Bela, Riesz, Ferenc, cora, Ildikó, Osváth, Zoltán, Jiang, Liudi, Borionetti,

Journal:

Year:

2016

Language:

english

File:

PDF, 1.76 MB

english, 2016

34

The Behavior of Polysilicon Thin Film Stress and Structure Under Rapid Thermal Processing Conditions

Huber, Walter, Borionetti, G., Villani, C.

Journal:

MRS Proceedings

Year:

1988

Language:

english

File:

PDF, 294 KB

english, 1988

35

SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Process and Materials Characterization and Diagnostics in IC Manufacturing - COPs/particles discrimination using an automated surface inspection tool

Lorenzi, Gabriele, Nguyen, Kim Hung, Sanna, Cristina, Orizio, Roberta, Borionetti, Gabriella, Tobin, Jr., Kenneth W., Emami, Iraj

Year:

2003

Language:

english

File:

PDF, 450 KB

english, 2003

36

A comparative analysis of different measurement techniques to monitor metal and organic contamination in silicon device processing

Polignano, M. L., Codegoni, D., Grasso, S., Mica, I., Borionetti, G., Nutsch, A.

Journal:

physica status solidi (a)

Year:

2015

Language:

english

File:

PDF, 3.35 MB

english, 2015

37

Atomic force microscopy: a powerful tool for surface defect and morphology inspection in semiconductor industry

Borionetti, G., Bazzali, A., Orizio, R.

Journal:

The European Physical Journal Applied Physics

Year:

2004

Language:

english

File:

PDF, 609 KB

english, 2004

38

Comparison of techniques for detecting metal contamination in silicon wafers

Polignano, M.L., Borionetti, G., Galbiati, A., Grasso, S., Mica, I., Nutsch, A.

Journal:

Spectrochimica Acta Part B: Atomic Spectroscopy

Year:

2018

Language:

english

File:

PDF, 804 KB

english, 2018

39

F-49 Comparison of X-ray and Mass Spectroscopy Based Analytical Methods for Detection of Organic Contamination

Nutsch, A., Leibold, A., Pfitzner, L., Otto, M., Beckhoff, B., Müller, M., Bedana, G., Borionetti, G., Guerinoni, G., Polignano, M. -L., Codegoni, D., Grasso, S., De Simone, D.

Journal:

Powder Diffraction

Year:

2010

File:

PDF, 102 KB

2010

40

F-49 Comparison of X-ray and Mass Spectroscopy Based Analytical Methods for Detection of Organic Contamination

Nutsch, A., Leibold, A., Pfitzner, L., Otto, M., Beckhoff, B., Müller, M., Bedana, G., Borionetti, G., Guerinoni, G., Polignano, M. -L., Codegoni, D., Grasso, S., De Simone, D.

Journal:

Powder Diffraction

Year:

2010

File:

PDF, 102 KB

2010

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